发明名称 METHOD AND SYSTEM FOR MANUFACTURING AND MANAGING OF PRODUCT
摘要 <p>PROBLEM TO BE SOLVED: To enhance the treating efficiency of a batch treated products in a manufacturing and managing system constituted of many manufacturing devices and stockers without necessity of an increase in size, acceleration of a host computer and complication of a program. SOLUTION: A product manufacturing apparatus 301 outputs a charging request to the host computer 100 (S201) for charging a product to be treated next, and the computer 100 upon receipt of the request retrieves a corresponding product lot and constitutes a batch of the retrieved lot, and conveys the constituted batch to the apparatus 301 (S206). The apparatus 301 outputs an additional charge request when the apparatus recognizes that the number of the lots of the conveyed batch to be treated next does not satisfy the maximum number of the batch lots (S213), and retrieves the lots capable of being added upon receipt of the request, and additionally conveys the retrieved lots to the apparatus (S310).</p>
申请公布号 JP2001196439(A) 申请公布日期 2001.07.19
申请号 JP20000009962 申请日期 2000.01.13
申请人 NEC CORP 发明人 YAMAGISHI MASAYUKI
分类号 H01L21/677;G06Q50/00;G06Q50/04;H01L21/00;H01L21/02;(IPC1-7):H01L21/68 主分类号 H01L21/677
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