APPARATUS AND METHOD FOR PREPARING ORGANIC EL DEVICE

摘要

An apparatus for preparing an organic EL device includes a substrate (1) and an evaporation source (2) in an evaporation chamber. The evaporation source (2) has a container (2) made of an insulator with a thermal conductivity of at least 50 W/m.k and receiving a source material therein and a surrounding resistance heater (3). When the source material is heated and evaporated from the source onto the substrate, a detector (5) detects the rate of evaporation of the source material on the substrate and delivers a detection signal to a control unit (6), which controls the heater (3) in accordance with the signal.