| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the stack thickness of a microlens array substrate (the optical distance from the surface of the microlens array substrate to the lens edges). SOLUTION: A microlens array pattern 56 is formed on the surface of a lens resin layer 52 formed on base glass 51, a sealing resin layer 58 is laminated on the lens resin layer 52, the surface of the layer 58 is made flat and cover glass 59 is put on the flat surface to form a microlens array substrate 61. In this method, a mark 57 for measurement is formed on the surface of the lens resin layer 52 in the region except the region of the microlens array pattern 56 at the same height as a plane of the pattern 56 including lens edges.
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