摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation apparatus that can ensure uniform energy of an electron beam to be applied to an object to be treated, even if the energy of the electron beam is enhanced. SOLUTION: In this electron beam irradiation apparatus, which includes electron beam tubes 1 with linear window parts 2 for the emission of electron beams, the electron beam tubes 1 are arranged, so that the longitudinal directions of the window parts 2 can be approximately in parallel with each other, and the longitudinal direction of each of the window parts 2 can be approximately orthogonal to the direction of the movement of an object 12 to be treated. The electron beam irradiation apparatus is characterized by providing adjustment means 4, 5, 6, 7, 8, 9, 10 and 11, that adjust the degree of the overlap of the electron beams emitted from an adjacent electron beam tube 21.
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