发明名称 |
Advanced process control for semiconductor manufacturing |
摘要 |
An Advanced Process Control (APC) Framework performs automatic process control operations through the design and development of a software framework that integrates factory, process, and equipment control systems. The APC Framework benefits semiconductor-manufacturing factories, or "fabs," throughout the development of the APC Framework by using an iterative development approach. The APC Framework is designed to integrate seamlessly with commercially-available APC tools. The APC Framework specifies components and a component structure that enable multiple vendors to build and sell framework-compatible products using an open architecture that accommodates plug-and-play components. The APC Framework advantageously increases product yield distributions and equipment utilization, and lowers defect densities.
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申请公布号 |
US6263255(B1) |
申请公布日期 |
2001.07.17 |
申请号 |
US19980080620 |
申请日期 |
1998.05.18 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
TAN HENG-WEI OSBERT;VINES, JR. DONALD H. |
分类号 |
G05B19/418;G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
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