SURFACE TREATMENT SYSTEM, SURFACE TREATMENT METHOD, AND SURFACE TREATED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment system capable of applying surface treatment by injecting ions by the plasma injection method even if the object of surface treatment is composed of an insulator. SOLUTION: The system is provided with an ion generation equipment 6 for generating ions and a pulse power source 8 for applying pulsative voltage to an insulator (material to be treated) 2. Ions generated by the ion generation equipment 6 are introduced into a vacuum chamber 3, where a plasma containing the ions to be injected is generated. By applying, within the plasma, the pulsative voltage containing positive pulse voltage and negative pulse voltage to the insulator from the pulse power source 8, the ions contained in the plasma are implanted into the insulator.