| 摘要 |
PROBLEM TO BE SOLVED: To put one cassette chamber in discharge state while preventing other cassette chambers from being shut in, in a semiconductor fabrication apparatus comprising a plurality of cassette chambers and a gas discharge pump used in common for discharging a gas out of the cassette chambers. SOLUTION: The semiconductor fabrication apparatus comprises a plurality of cassette chambers 2, 3 installed in a transportation chamber, treatment chambers 4, 5 installed in the transportation chamber, a transportation chamber gas discharge line 13 equipped with the gas discharge pump 20 installed in the transportation chamber, cassette chamber gas discharge lines 15, 17 connected to the cassette chambers, a gas discharge pump 26 to be used in common for at least two cassette chamber gas discharge lines, and connection lines 45, 47 connecting the cassette chamber gas discharge lines 45, 47 equipped with the common gas discharge pump to the transportation chamber gas discharge line. |
