| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal ink jet printer head having a protection film which is provided in each of a heating section and a circuit pattern and is superior in an electric insulation property, a cavitation resistance property, a dry etching resistance property, a heat resistance property, a thermal conductivity and an adhesion property. SOLUTION: In a thermal ink jet printer head 24, a heating resistor film 27, the heating section 27-1, an adhesion layer 28, a common electrode 29, an individual circuit electrode 31, the protection film 32, a first partition wall 35, a second partition wall 36 and an orifice plate 37 are laminated on a passivation film 26 provided on the surface of a silicon substrate 25 and a nozzle 38 is formed on the orifice plate 37. The protection film 32 is so constituted that inorganic particles 34 of Al2O3, AlN, silicon or the like are mixed in an organic substance 33 such as a polyimide, an epoxy resin or the like.
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