IC device temperature control system and IC device inspection apparatus incorporating the same

摘要

An IC device temperature control system is provided which includes a magnetometric sensor that detects a magnetic field generated around an IC device received in a chamber for inspection when electric current is supplied to the IC device, and a converter that converts an output signal from the magnetometric sensor to information indicative of an amount of heat generated by the IC device. A temperature control device controls a temperature of the IC device, and a control unit controls the temperature control device to maintain the temperature of the IC device within a predetermined range based on the information indicative of the amount of heat generated by the IC device.