发明名称 |
LOW TEMPERATURE SYNTHESIS METHOD OF CARBON NANOTUBES BY USING CATALYTIC METAL FILM FOR DISSOLVING CARBON SOURCE GAS |
摘要 |
PURPOSE: A synthesis method of carbon nanotubes having high purity is provided which mass-synthesizes the carbon nanotubes vertically aligned on a large-sized base plate at lower temperature than a strain temperature of the large-sized base plate. CONSTITUTION: The method comprises steps of: (i) forming a catalytic metal film on a base plate; (ii) forming independently isolated nano-sized catalytic metal particles by etching the catalytic metal film; and (iii) growing the isolated nano-sized catalytic metal particles by a thermochemical vapor deposition method, which thermally decomposes a carbon source gas at a temperature of lower than the strain temperature of the base plate by using a catalytic metal film for decomposing the carbon source gas, in order to form plural carbon nanotubes vertically aligned on the base plate.
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申请公布号 |
KR20010066816(A) |
申请公布日期 |
2001.07.11 |
申请号 |
KR20000030353 |
申请日期 |
2000.06.02 |
申请人 |
ILJINNANOTECH INC.;LEE, CHEOL JIN |
发明人 |
LEE, CHEOL JIN;YOO, JAE EUN |
分类号 |
B82B3/00;C01B31/02;C23C16/26;(IPC1-7):B82B3/00 |
主分类号 |
B82B3/00 |
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