METHOD FOR REPRODUCING CANTILEVER PROBE TIP OF SCANNING PROBE MICROSCOPE

摘要

PURPOSE: A method for reproducing a cantilever probe tip of a scanning probe microscope is provided to reproduce a cantilever probe tip by the machining with a focused ion beam equipment, thereby reusing the tip for reducing the maintaining cost of the analyzing equipment. CONSTITUTION: A method for reproducing a cantilever probe tip of a scanning probe microscope includes the steps of coating metal ions by a predetermined thickness on a cantilever probe tip, mounting the cantilever probe tip(10) on a focused ion beam equipment and tilting the cantilever probe tip until a corner becomes vertical for setting a fine machining area, removing the fine machining area set by the focused ion beam and rotating the tip by a predetermined angle with respect to a shaft Z perpendicular to a plane surface, setting a new fine machining area, and repeating the third and fourth steps until the tip rotates by 360°.