| 摘要 |
PURPOSE: A filter wetting system is provided, which can supply wetting solution by a suction device without any pump so that can save investment cost of pump and can be operated trouble freely for an extended time of operation. CONSTITUTION: The system comprises the followings: (i) a wetting solution supplying device (B1) in which wetting solution is contained for wetting the filters (F1,F2); (ii) a nitrogen supplying device (12) for supplying nitrogen through nitrogen supplying line (P2); (iii) an ultra pure water supplying device (11) for supplying ultra pure water through ultra water supplying line (P1); (iv) a suction device (20) for generating vacuum inside the suction device (20) and for taking in wetting solution by vacuum; (v) two filter housings (F1,F2) in which filter is mounted and is wetted by the filter wetting solution fed for diluting the filter wetting solution with ultra pure water; and (vi) drain devices (13,15) for discharging wetting solution and ultra pure water.
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