| 摘要 |
PURPOSE: An actuator manufacturing method for an ink jet printer head is provided to simplify the manufacturing process by forming a structure by direct silicon joining and removing any insulation layer forming steps by using a silicon material for forming a vibration plate, thereby increasing the processing precision and the integration ratio. CONSTITUTION: An actuator manufacturing method for an ink jet printer head includes the steps of preparing a silicon wafer, forming an etching stop layer(12) at a lower part of the silicon wafer, forming a vibration plate(14) formed of a silicon material, joining the vibration plate with a lower part of the etching stop layer by thermal processing, forming a chamber plate(16) formed of silicon material, forming a chamber in the chamber plate by full-etching, joining the chamber plate formed with the chamber with a lower part of the vibration plate by thermal processing, finishing a lower structure of the actuator by removing the silicon wafer, forming a lower electrode(20) on the lower structure, forming a piezo-electric/electro-striction(22) with a uniform pattern on the lower electrode for actuating in response to power supply, and forming an upper electrode(24) on the piezo-electric/electro-striction film.
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