| 发明名称 |
Intermetallic aluminides and silicides articles, such as sputtering targets, and methods of making same |
| 摘要 |
Described is an in situ method for producing articles of metal aluminide or silicide by reactive sintering and vacuum hot pressing powders and products, such as sputtering targets, produced.
|
| 申请公布号 |
US6258719(B1) |
申请公布日期 |
2001.07.10 |
| 申请号 |
US19980108610 |
申请日期 |
1998.07.01 |
| 申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
SHAH RITESH P.;MORALES DIANA L.;KELLER JEFFREY A. |
| 分类号 |
B22F3/23;C22C1/04;C23C14/34;H01L21/285;(IPC1-7):H01L21/44 |
主分类号 |
B22F3/23 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
