Scanning probe microscope having piezoelectric member for controlling movement of probe

摘要

A scanning probe microscope comprises an elastic probe having a longitudinal axis and a probe tip. A vibration device has a piezoelectric vibrating member and an AC voltage generator for vibrating the probe tip relative to a surface of a sample. A vibration detecting device has a piezoelectric detecting member and a current/voltage amplifier circuit for detecting vibration of the probe tip. A probe holder supports the probe such that the probe is biased into pressure contact with the piezoelectric detecting member at an oblique angle relative to the longitudinal axis of the probe while the probe tip extends in a Z direction generally perpendicular to sample surface during vibration of the probe tip relative to the sample surface. A coarse movement mechanism effects coarse displacement of the probe tip in the Z direction to bring the probe tip close to the surface of the sample. A sample-to-probe distance control device has a fine displacement element and a servo circuit for effecting fine displacement of the probe tip in the Z direction. A two-dimensional scanning device has a fine displacement element and a scanning circuit for scanning the probe tip in X and Y directions to generate a measurement signal. A data processing device converts the measurement signal into a three-dimensional image.