| 摘要 |
A method of manufacturing an ink jet printhead includes providing a substrate. A doped layer is deposited on the substrate and is etched to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle. Planar monolithic deposition, lithographic and etching processes are used to form a first actuator displaceably arranged relative to the nozzle chamber such that, upon activation, it is displaced towards a nozzle opening of the nozzle to effect ink ejection from the nozzle opening and a second actuator, also displaceably arranged relative to the nozzle chamber, for assisting in refilling of the nozzle chamber after ejection of ink under the action of the first actuator.
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