EVALUATION SYSTEM OF CHEMICAL FILTER AND EVALUATION METHOD OF CHEMICAL FILTER USING THE SAME

摘要

PURPOSE: An evaluation system of chemical filter and an evaluation method of chemical filter using the same are provided to be capable of evaluating the presence of contamination substance in a chemical filter itself. CONSTITUTION: A chamber(44) is isolated from external contamination sources and has the same internal conditions as those of a clean room. A first gas line(L1) is connected to one side of the chamber(44). A second gas line(L2) is connected to the other side of the chamber(44) to oppose the first gas line(L1). A temperature controller(48) for constantly maintaining the internal temperature of the chamber(44) is mounted on a wall of the chamber(44). A mass flow controller(50) is mounted on the first gas line(L1) to control the gas amount flowing in the chamber(44) through the first gas line(L1).