| 摘要 |
PURPOSE: A comb of transfer device is provided to enable separation and combination between a comb body and a pin and to replace the pin in case the pin is damaged. CONSTITUTION: A pin(20) is inserted to an insertion hole(11) of a body(10) to be aligned on end portion of the body. At a bottom of the pin(20), a groove(21) is formed for nut fixing. Between a bottom of the fixed pin(20) and a bottom of the pin insertion hole(11), a free space is provided for a nut(13) and the groove(21) to be combined at a precise location. A comb proceeds in parallel in a unit of pair for mounting a wafer loaded inside a cassette between each pin(20). In case the pin is bent or broken, a nut(13) is released and the pin(20) is separated from the body(10) for replacing to a normal product. Thereby, in occurrence of defect of pin(20), only partial replacement enables continuous usage without replacing entire comb.
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