| 摘要 |
PURPOSE: A test pattern is provided to effectively prevent the defect of a device due to the bending by enabling easy test about the bending of the device according to the length and the interval of the pattern. CONSTITUTION: A test pattern has a lower pattern, an insulation film(15), a number of plugs(23) and an upper pad. The lower pattern has a main pattern(14) and a number of sub-patterns(14A-14C) connected to the main pattern and having widths different from each other. The insulation film(15) is positioned on the lower pattern, and has a number of contact holes(16) to respectively expose a portion of the main pattern(14) and both sides of the sub-patterns(14A-14C). The plugs(23) are formed in the contact holes(16). The upper pad is positioned on the insulation film(15), and has an input pad(19), output pads(20-22) and a number of measurement patterns(24). The measurement patterns(24) are positioned to overlap with the sub-patterns(14A-14C).
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