COMPOSITE MEMBER SEPARATING METHOD, THIN FILM MANUFACTURING METHOD, AND COMPOSITE MEMBER SEPARATING APPARATUS

摘要

PURPOSE: A composite member separating method, a thin film manufacturing method, and a composite member separating apparatus are provided to improve the reproducibility of a crack generation position in a composite member such as a bonded substrate stack and suppress the amount of damage to the thin film at the end portion. CONSTITUTION: The apparatus has a support table(201) having a support portion(203) for supporting the bonded substrate stack(30), an elastic body(202) for pressing the bonded substrate stack(30) against the support portion(203), a wedge(210), a driving shaft(211) having a rack to reciprocally move the wedge(210), a guide member(212) for guiding the driving shaft(211), and a motor(213) having a pinion gear to apply a driving force to the driving shaft(211) and reciprocally move the driving shaft(211).