| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film capacitor wherein copper and its oxide that are inexpensive and have high conductivity are used for electrode material and stress in the manufacturing process is relaxed. SOLUTION: In a thin-film capacitor wherein an electrode 11, a dielectric layer 21 and an electrode 12 are laminated on a substrate 1, a composite material of copper and cuprous oxide is used for the electrodes 11 and 12. As a result, the stresses generated in the manufacturing process between the substrate 1 and the electrode 11 and between the electrodes 11 and 12 and the dielectric layer 21 are relaxed and the generation of cracks and peelings and the like can be reduced.
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