发明名称 APPARATUS FOR DRIVING PRESS PORTION OF SEMICONDUCTOR MOLDING SYSTEM
摘要 PURPOSE: An apparatus for driving a press portion of a semiconductor molding system is provided to operate two master dies by using one servomotor. CONSTITUTION: A guide rail(2) is installed at each edge portion of a frame(1) of a press portion. An upper platen(3) and a lower platen(4) are installed at an upper portion and a lower portion of the frame(1), respectively. Master dies(5,6) are installed at the upper and the lower platens(3,4). A center platen(7) is fixed at the frame(1) between the upper and the lower platens(3,4). Master dies(8,9) are installed on an upper portion and a lower portion of the center platen(7). A ball screw(10) is installed at a lower center of the frame(1). A cross link(11) is installed at the ball screw(10). A plurality of arm(13) is combined with an end portion of the cross link(11) by a joint. The arms(13) is connected with a gravity center platen(14).
申请公布号 KR20010058866(A) 申请公布日期 2001.07.06
申请号 KR19990066238 申请日期 1999.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, CHANG HUI
分类号 H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/56
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