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发明名称
VERFAHREN ZUR BESCHICHTUNG VON SUBSTRATEN DURCH CVD MIT EINER SILIZIUMHALTIGEN SCHUTZSCHICHT
摘要
申请公布号
DE59703686(D1)
申请公布日期
2001.07.05
申请号
DE19975003686
申请日期
1997.08.29
申请人
BAYER AG
发明人
BALDUS, HANS-PETER;PASSING, GERD;SCHOENFELDER, LOTHAR;MEISTRING, ROLF;BENIEN, HANNELORE;HALTRICH, MARC
分类号
C23C16/00;C23C16/30;(IPC1-7):C23C16/30
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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