SUBSTRATE HOLDING CHUCK

摘要

PURPOSE: A substrate holding chuck is provided to prevent the defect and spot of a substrate by removing a water remaining on the surface thereof from a cleaning process to a drying process of deionized water. CONSTITUTION: A chuck arms(10) holds the side end of a substrate(30). A nitrogen nozzle(40) has a plurality of spraying hole formed in order directing to the surface of the substrate(30). A nitrogen supplying unit is a mobile route supplying a nitrogen to the inside of the nitrogen nozzle(40). The farther spraying hole goes on from the entrance to the exit thereof the larger the diemeter of the hole become. A plurality of chuck loads(20) contacting the side of the substrate(30) is installed on the inner side of the chuck arm(10).