METHOD FOR PRODUCING METALLIC NANO MICRO WIRES BY USING CARBON NANO TUBE

摘要

PURPOSE: A method for producing metallic nano micro wires is provided for overcoming restrictions of lithographic process to prepare several to several tens nm of line width by using carbon nano tubes as a mask to ion beam. CONSTITUTION: The method for producing metallic nano micro wires having several to several tens nm of line width to overcome limits of known lithographic process comprises a pattern forming process including a first step to form the carbon nano tube (14) on film to be under etching process; a second step to etch the film not covered with the carbon nano tube as a mask to ion beam; and a third step to remove the carbon nano tube. The film to be etched comprises Ti film (12) and Au film (13) deposited in order onto surface of silicon substrate (10) completely formed with silicon oxides film (11).