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发明名称
ROBOTS FOR MICROELECTRONIC WORKPIECE HANDLING
摘要
申请公布号
EP1112220(A1)
申请公布日期
2001.07.04
申请号
EP19990933843
申请日期
1999.07.09
申请人
SEMITOOL, INC.
发明人
SCHMIDT, WAYNE, J.;OBERLITNER, THOMAS, H.
分类号
B25J9/06;B25J9/00;B25J9/08;B25J15/06;H01L21/67;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):B66C1/00
主分类号
B25J9/06
代理机构
代理人
主权项
地址
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