Method of manufacture of high Young's modulus thermoelastic inkjet printer

摘要

A method of manufacturing a thermally actuated ink jet printhead includes the step of initially providing a wafer having a circuitry layer including the electrical circuitry necessary for the operation of a thermal actuator. A first sacrificial layer is deposited on the wafer and is etched. A Young's modulus layer is deposited to form a first layer of a thermal actuator and a portion of a nozzle chamber wall. A conductive heater material layer is provided and has a portion interconnected to the circuitry layer. A second sacrificial layer is deposited and etched in preparation for nozzle chamber walls. A nozzle wall material layer is deposited to form the walls of the nozzle chamber. The nozzle wall material layer is etched to define a nozzle port for the ejection of ink. The sacrificial layers are etched away to release the thermal actuator. The nozzle chamber walls are formed to define a fulcrum for the thermal actuator.