METHOD FOR DEPOSITING GLASS FILM

摘要

PROBLEM TO BE SOLVED: To improve the method for depositing a glass film by which the refractive index and thickness are made the same over the whole of the glass film. SOLUTION: In the method for depositing a glass film by which a silicon dioxide glass film essentially consisting of silicon dioxide and containing germanium dioxide of several % to 30% is deposited on a substrate by using a sputtering method, a target used for the sputtering method is composed of silicon dioxide and germanium dioxide, and its density is controlled to 70% or more of the solid body having the same composition.