| 摘要 |
An electrostatic chuck device is characterized in the provision of a ceramic layer, which serves as an adsorption surface, via an electricity insulating elastic layer, and an electrode that is formed between the ceramic layer and the electricity insulating elastic layer. The electricity insulating elastic layer consists of an adhesive that contains a rubber component and a phenol-type antioxidant. This electrostatic chuck device does not easily experience wear or deformation, and has extremely high durability. The electricity insulating elastic layer relieves stress caused by differences in coefficients of thermal expansion during heating, or by slight volume changes in the resin material. As a result, the stress applied on the ceramic layer can be reduced, making it possible to limit a reduction in the degree of flatness and the like.
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