发明名称 |
Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module |
摘要 |
A bowl includes a bottom wall having a generally circular shape. A sidewall extends upwardly from the bottom wall to define a cylindrical chamber. The sidewall has a projection that extends into the cylindrical chamber. The projection has a top surface that defines a step in the cylindrical chamber and a sloped surface that extends between the top surface and an inner surface of the sidewall. The top surface of the projection is sloped slightly downwardly. The sloped surface of the projection is oriented relative to the top surface such that extensions of the top surface and the sloped surface define an angle in a range from about 30 degrees to about 45 degrees. A spin, rinse, and dry module including the bowl and a method for loading a semiconductor wafer into a spin, rinse, and dry module also are described. |
申请公布号 |
AU2452401(A) |
申请公布日期 |
2001.07.03 |
申请号 |
AU20010024524 |
申请日期 |
2000.12.20 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
ROY WINSTON PASCAL;BRIAN M. BLIVEN |
分类号 |
H01L21/304;H01L21/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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