| 摘要 |
PURPOSE: A semiconductor device transfer system is provided to realize a smooth transferring process without requiring speed reduction at approaching the end of the transferring process and thereby to improve process efficiency. CONSTITUTION: The transfer system is characterized by a pair of guide bars(12) of a loading unit(10) and corresponding guide brackets(25) of an overhead hoist transporter(20). The loading unit(10) further has a loading port(11), while the overhead hoist transporter(20) further has a guide rail(21), a vehicle(22) and a gripper(24). To transfer a transfer target(1) such as a cassette, the vehicle(22) moves above the transfer target(1) along the guide rail(21), and the gripper(24) movably connected to the vehicle(22) through a flat belt(23) moves also above the transfer target(1). After the gripper(24) grips the target(1), the vehicle(22) moves to the loading unit(10) along the guide rail(21). When the vehicle(22) arrives at the loading unit(10), each of the guide bars(12) is inserted into a guide hole(26) formed in the guide bracket(25). Particularly, a top of the guide bar(12) has a conical shape. Therefore, though the vehicle(22) arrives in a little wrong position, the guide hole(26) can be exactly combined with the corresponding guide bar(12) and thereby the transfer target(1) can be correctly loaded onto the loading port(11).
|
