| 摘要 |
PURPOSE: A polishing machine is provided to precisely measure polishing pressure in real time and to finely control the polishing pressure. CONSTITUTION: A polishing machine consists of a polisher(4) polishing a material by rotating in a housing(2); a motor(8) connecting the polisher and a rotating shaft(6) to give rotational force to the polisher; a position adjuster(16) vertically transferring the polisher based on the material; a pressure sensor(14) measuring pressure applied to the polisher during a polishing process; an actuator(12) finely moving the polisher by the position adjuster; and a controller(18) driving the actuator after comparing the pressure measured by the pressure sensor with a reset pressure. The motor includes a stator(10) and the actuator finely adjusts the stator to polish the material within a set pressure. The position adjuster lifts the housing using a ball screw and a liner motor. A diaphragm or a spring(20) is used as a polisher supporter, between the stator and the housing.
|
