发明名称 Doping of extrinsic base of a bipolar transistor minimizes enlargement of base for improved transistor performance
摘要 Doping of the extrinsic base of a bipolar transistor is effected in the vapor phase by putting into hot contact the region of the extrinsic base (8) with a flow of doping gas (FLX).
申请公布号 FR2803091(A1) 申请公布日期 2001.06.29
申请号 FR19990016283 申请日期 1999.12.22
申请人 STMICROELECTRONICS SA 发明人 MARTY MICHEL;DUTARTRE DIDIER;CHANTRE ALAIN;FELLOUS CYRIL
分类号 H01L21/223;H01L21/331;(IPC1-7):H01L21/223;H01L21/822 主分类号 H01L21/223
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