| 摘要 |
PROBLEM TO BE SOLVED: To improve durability of a sensor and to lower the cost for heat- resistance countermeasures by protecting an optical sensor sufficiently against radiation heat from a furnace opening, etc. SOLUTION: This processor is equipped with a thermal processing furnace 6 having a furnace opening 5 at its lower end, lid body 9 which opens and closes the furnace opening 5, support body 10 which is mounted on the lid body 9 and supports many processed bodies (2) in array along the height, elevation mechanism 12 which opens and closes the lid body 9 and carries the support body 10 in and out of the thermal processing furnace 6, and optical sensor 19 which detects the position of the lid body 9. In order to protect the sensor against the radiation heat from the furnace opening, etc., a protective cover 26 is provided, so as to cover at least an upper sensor 19A. This protection cover 26 is provided with heat shield plates 27 in layers and also provided with a heat insulating member 28 on the outside.
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