| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibration wave driver which can be employed as a thin automatic Z-axis stage by utilizing a vibration wave motor. SOLUTION: The vibration wave driver comprises an vibration wave motor having a through hole in a shaft part for rotating an annular moving body 5 with a driving vibration formed in an annular vibrator 1 by bringing the vibrator 1 and the moving body 5 into pressure contact and applying a driving signal to the piezoelectric element 3 in the vibrator 1, converting means 5a, 10, 11, 11b provided around the through hole and converting rotation of the moving body 5 into axial motion, and a moving member 11 being advanced straight in the axial direction by an axial motion converted through the converting means.</p> |
