| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for accurately measuring the film thickness of an optical element by using measuring equipment, even when measured value deteriorates due to the resolution of the measuring equipment, and the accurate measurement cannot be conducted. SOLUTION: Film thickness is calculated through the fitting of spectral permeability calculated assuming film thickness and measured spectrum permeability. At this time, the calculated spectrum permeability is corrected by sensitivity characteristics indicating the resolution of spectrum permeability measuring equipment, so that the corrected spectrum permeability to be actually observed can be calculated, and that the film thickness can be calculated by the fitting of the corrected spectrum permeability and the measured spectrum permeability. Thus, the film thickness can be calculated accurately, regardless of the resolution of the measuring equipment.
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