| 摘要 |
<p>A film forming device comprising an evacuatable treating vessel, and a carrying stand installed in the treating vessel and capable of carrying a treatment subject thereon. An annular guide ring member is disposed above the carrying stand to surround the outer periphery of the treatment subject carried on the carrying stand, and it is arranged that the treatment subject is guided onto the carrying stand when the treatment subject is to be carried on the carrying stand. A particle production prevention space is defined between the lower surface of the guide ring member on its inner peripheral side and the upper surface of the carrying table.</p> |
