发明名称 BIPOLAR TRANSISTOR HAVING LIGHTLY DOPED EPITAXIAL COLLECTOR REGION CONSTANT IN DOPANT IMPURITY AND PROCESS OF FABRICATION THEREOF
摘要 A bipolar transistor has a lightly doped n-type single crystal silicon layer epitaxially grown in a recess formed in a heavily doped n-type impurity region after a selective growth of a thick field oxide layer, a base region, an emitter region and a collector contact region are formed in surface portions of the lightly doped n-type single crystal silicon layer, and the single crystal silicon layer is not affected by the heat during the growth of the thick field oxide layer, and has a flat zone constant in dopant concentration regardless of the thickness thereof.
申请公布号 US2001005035(A1) 申请公布日期 2001.06.28
申请号 US19970807326 申请日期 1997.02.27
申请人 KINOSHITA YASUSHI 发明人 KINOSHITA YASUSHI
分类号 H01L21/331;H01L29/08;H01L29/732;(IPC1-7):H01L27/082;H01L27/102 主分类号 H01L21/331
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