Removal of gaseous boron trifluoride and pretreatment of process waste gas involves spraying with water or aqueous solution to form boron oxide and hydrogen fluoride and optionally condense water and acid

摘要

Process for removing gaseous boron trifluoride (BF3) and pretreating process waste gas comprises spraying water or an aqueous solution into hot (I) to convert the BF3 to boron oxide and hydrogen fluoride (HF), using at least half the stoichiometric amount of water for chemical decomposition of the BF3 in waste gas and at most the amount needed for condensing water or also an acid in the waste gas.