发明名称 Near-field optical probe and scanning near-field optical microscope
摘要 <p>Realized are a near-field optical probe capable of illuminating or/and detecting near-field light great in intensity and acquiring an optical image great in S/N ratio, and a manufacturing method and near-field optical apparatus. Accordingly, a near-field optical probe comprises a cantilever in a cantilever form, a base for supporting the cantilever, a tip in a weight form formed on the cantilever, a microscopic aperture formed in an end of the tip, and a shade film formed on a surface of the cantilever opposite to the base and on area other than the microscopic aperture of the tip. The tip and the cantilever are formed of a transparent material high in transmissivity relative to a wavelength of light to be generated and/or detected by the microscopic aperture, and the tip is structurally filled with the transparent material. <IMAGE></p>
申请公布号 EP1111426(A2) 申请公布日期 2001.06.27
申请号 EP20000311436 申请日期 2000.12.20
申请人 SEIKO INSTRUMENTS INC. 发明人 TAKASHI, NIWA;KATO, KENJI;KASAMA, NOBUYUKI;OUMI, MANABU;MITSUOKA, YASUYUKI;ICHIHARA, SUSUMU
分类号 G01B11/30;G01Q60/18;G01Q60/22;G01Q70/10;G01Q70/14;G01Q70/16;(IPC1-7):G02B21/00 主分类号 G01B11/30
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