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发明名称
Vapor phase growth method and growth apparatus
摘要
申请公布号
EP0803588(B1)
申请公布日期
2001.06.27
申请号
EP19970106165
申请日期
1997.04.15
申请人
NEC CORPORATION
发明人
TATSUMI, TORU
分类号
H01L27/04;C23C16/448;C23C16/452;C23C16/52;H01L21/205;H01L21/31;H01L21/316;H01L21/822;(IPC1-7):C23C16/18
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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