摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet head in which the yield and reliability of a product are enhanced by preventing occurrence of incomplete bonding. SOLUTION: The ink jet head comprises a driving board 1, a driver IC chip 11 arranged thereon through a polyimide layer 21, a piezoelectric film 6 formed between the chip 11 and the driving board 1, a bonding wire 13 for applying a voltage from the chip 11 to the piezoelectric film 6, a pressure generating chamber 1b formed in the driving board 1 and receiving ink pressurized by the piezoelectric film 6, and a space 11a defined by the polyimide layer 21 between the rear surface of the chip 11 and the piezoelectric film 6 and preventing movement of the piezoelectric film 6 from being blocked at the time of pressurizing ink in the pressure generating chamber 1b.
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