| 摘要 |
PROBLEM TO BE SOLVED: To enhance an oxidation resistance and an integration degree by simplifying a manufacturing process for an actuator for an ink-jet printer head and enabling the manufacturing process at high temperatures. SOLUTION: The manufacturing method includes a step of providing a silicon wafer, a step of forming an etching-stopping layer to a lower part of the silicon wafer, a step of forming a diaphragm of a silicon-based substance, a step of joining the diaphragm to a lower part of the etching-stopping layer by a heat treatment, a step of forming a chamber plate of a silicon-based substance, a step of fully etching the chamber plate thereby forming a chamber, a step of joining the chamber plate to a lower part of the diaphragm by a heat treatment, a step of removing the silicon wafer thereby completing a lower structure of the actuator, a step of forming a lower electrode to an upper part of the lower structure, a step of forming a piezoelectric/electrostrictive film and a step of forming an upper electrode to an upper part of the piezoelectric/ electrostrictive film. |
