| 摘要 |
PURPOSE: A heat treatment apparatus, cooling method and apparatus are provided to shorten the recovery time. CONSTITUTION: A baking apparatus(34) comprises a temperature control unit(62), which controls a heater(61) in hot plate(60) with a PID, and a parameter- changing unit(63) controlled with the PID, which changes each control parameter for each different temperature. A cooling apparatus comprises a temperature control unit, which controls a peltier element in a cooling plate in the PID and a parameter-changing unit controlled with PID, which changes each control parameter based on the temperature of the cold plate detected by a temperature sensor.
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