| 摘要 |
PURPOSE: To provide an evaluation tool for a semiconductor integrated circuit device in which the evaluation using actual products is not necessary. CONSTITUTION: For instance, piezo-diffusion resistance units 12 and temperature monitor units are arranged in the neighborhoods of the corner parts and the neighborhood of the center part on an Si substrate 11 close to each other. A polycrystalline silicon resistor array 14 is arranged on the parts of the Si substrate 11, except the parts on which the piezoelectric resistance units 12 and the temperature monitor units are formed. A wiring layer 18 composed of second layer Al wirings is formed on the resistance units 12, the monitor units and the array 14. Thus, by forming a structure with differences in the levels, an evaluation tool which has an approximately the same construction as the actual product can be obtained, so that the evaluation can be made upon the construction approximated the same as that of the actual product.
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