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发明名称
INxGa1-xP STOP-ETCH LAYER FOR SELECTIVE RECESS OF GALLIUM ARSENIDE-BASED EPTITAXIAL FIELD EFFECT TRANSISTORS AND PROCESS THEREFOR
摘要
申请公布号
KR20010052109(A)
申请公布日期
2001.06.25
申请号
KR1020007005795
申请日期
2000.05.26
申请人
发明人
分类号
H01L21/338
主分类号
H01L21/338
代理机构
代理人
主权项
地址
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