| 摘要 |
PROBLEM TO BE SOLVED: To provide a membrane forming device with which a coating liquid can be uniformly applied onto the surface of a sheet member and there is no contamination. SOLUTION: This device is provided with a placing part 41 having a placing plane 41 equal with or larger than the area of a film F and plural adsorption grooves 42a, 42b, 42c and 42d for adsorbing the outer peripheral side of the back of the film F, a driving mechanism 2 for rotating a base member 4, with which the film F is placed on the placing plane 41, a resist applicator nozzle 6 for feeding a resist onto the surface of the film F placed on the placing plane 41 and a washing liquid feed nozzle 7 for feeding a washing liquid to the outer peripheral side of the front of the film F so as to remove the coating liquid fed to the outer peripheral side of the front of the film F placed on the placing plane 41 in the state of rotating the film F, to which the resist is fed onto the front by the resist applicator nozzle 6, with the driving mechanism 2. |
