| 摘要 |
PROBLEM TO BE SOLVED: To place the probe of an illuminance meter on a substrate stage easily. SOLUTION: As the shape of the measuring plate 9 of an illuminance meter 8 is equal to that of a substrate holder or substrate, it is possible to use a replacing device, robot, etc., for replacing substrate holders or substrates for replacing the measuring plate 9. Therefor, there is no need for an operator to place the measuring plate 9 on a substrate stage directly with his hand, and it is possible to place the measuring plate 9 as a probe on the substrate stage easily and highly accurately.
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