发明名称 LAMINATED PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a laminated piezoelectric element, such as a lamination piezoelectric actuator element or the like in which insulation resistance of a piezoelectric layer will not deteriorate, even under high-humidity environment, humidity is superior, and reliability is high. SOLUTION: In a laminated piezoelectric element 2, in which a piezoelectric layer 4 and internal electrode layers 6a, 6b are alternately laminated, the internal electrode layers 6a, 6b contain Au as essential components. Preferably, in the internal electrode layers 6a, 6b, at least one kind of element from among Pd, Pt and Rh is included. Preferably, when all weights % of a metal component in the internal electrode layers 6a, 6b are 100, the content of Au in the internal electrode layer is 20 to 90 wt.%. Preferably, a thickness of the internal electrode layers 6a, 6b is 1 to 3 μm.
申请公布号 JP2001168408(A) 申请公布日期 2001.06.22
申请号 JP20000190654 申请日期 2000.06.26
申请人 TDK CORP 发明人 KOJIMA TATSUYA;HORINO KENJI
分类号 B81B3/00;C04B35/00;H01L41/047;H01L41/083;H01L41/187;H01L41/22;H01L41/297;H01L41/43;H03H3/02;H03H9/17 主分类号 B81B3/00
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