发明名称 |
DUAL ARM APPARATUS WITH CO-AXIAL DRIVE SHAFTS |
摘要 |
<p>A substrate transport apparatus having a drive section and a movable arm assembly connected to the drive section. The drive section has a coaxial drive shaft assembly with independently rotatable drive shafts. The movable arm assembly has two scara arms. Each scara arm has an inner arm connected to a separate respective one of the drive shafts. An outer arm of each scara arm is connected to a rotationally stationary pulley on the drive section by respective transmission belts.</p> |
申请公布号 |
EP1107853(A1) |
申请公布日期 |
2001.06.20 |
申请号 |
EP19990915293 |
申请日期 |
1999.04.06 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
BEAULIEU, DAVID, R. |
分类号 |
B25J9/06;B23H9/06;B25J17/00;B65G49/07;H01L21/677;H01L21/687;(IPC1-7):B25J9/06 |
主分类号 |
B25J9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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